Author:
Semura Shigeru,Saitoh Hiroshi,Asakawa Kiyoshi
Subject
General Physics and Astronomy
Cited by
33 articles.
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1. Raman Scattering as a Diagnostic Tool of Semiconductor Nanofabrication;Optical Spectroscopy of Low Dimensional Semiconductors;1997
2. High ion density dry etching of compound semiconductors;Materials Science and Engineering: B;1996-09
3. Reactive ion etching of GaSb and GaAlSb using SiCl4;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-09
4. Patterned, photon-driven cryoetching of GaAs and AlGaAs;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-01
5. Magnetically confined plasma reactive ion etching of GaAs/AlGaAs/AlAs quantum nanostructures;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-11