Raman Scattering as a Diagnostic Tool of Semiconductor Nanofabrication
Author:
Torres C. M. Sotomayor
Publisher
Springer Netherlands
Reference42 articles.
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55, 3131–3135. 4. Watt, M. Sotomayor Torres, C.M., Cheung, R., Wilkinson, C.D.W., Arnot, H.E.G. and Beaumont, S.P. (1988a) Raman scattering of reactive-ion etched GaAs, Journal of Modern Optics, 35, 365–370. 5. Watt, M. Sotomayor Torres, C.M., Cheung, R., Wilkinson, C.D.W., Arnot, H.E.G. and Beaumont, S.P. (1988b) Raman scattering investigations of the damage caused by reactive-ion-etching of GaAs, Superlattices and Microstructures, 4, 243–244.
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