Ion beam enhanced epitaxial growth of Ge (001)
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104024
Reference11 articles.
1. Low-energy ion beams, molecular beam epitaxy, and surface morphology
2. Low-temperature epitaxial growth of Si and Ge and fabrication of isotopic heterostructures by direct ion beam deposition
3. Epitaxial growth of silicon at low temperature by ultrahigh vacuum electron cyclotron resonance plasma chemical vapor deposition
4. Low‐temperature silicon epitaxy by low‐energy bias sputtering
5. An optimizedinsituargon sputter cleaning process for device quality low‐temperature (T≤800 °C) epitaxial silicon: Bipolar transistor andpnjunction characterization
Cited by 53 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Growth of Nb films on Cu for superconducting radio frequency cavities by direct current and high power impulse magnetron sputtering: A molecular dynamics and experimental study;Surface and Coatings Technology;2024-01
2. Mechanisms of Dopant Depth Profile Modification During Mass Spectrometric Analysis of Multilayer Structure;Ukrainian Journal of Physics;2015-06
3. From sponge to dot arrays on (100) Ge by increasing the energy of ion impacts;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11
4. Kinetic-energy induced smoothening and delay of epitaxial breakdown in pulsed-laser deposition;Physical Review B;2007-08-24
5. Hydrogen induced roughening and smoothing in surface morphology during synchrotron-radiation-excited GeH4-source homoepitaxy on Ge(001);Journal of Applied Physics;2006-05-15
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3