Author:
Efremov A.A., ,Litovchenko V.G.,Melnik V.P.,Oberemok O.S.,Popov V.G.,Romanyuk B.M.
Publisher
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)
Subject
General Physics and Astronomy
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5. High-resolution sputter depth profiling with a low pressure hf plasma
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