Fatigue reliability based optimal design of planar compliant micropositioning stages
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4933387
Reference26 articles.
1. Piezodriven 50‐μm range stage with subnanometer resolution
2. Optimal design of a flexure hinge based XYφ wafer stage
3. Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator
4. The constant-Jacobian method for kinematics of a three-DOF planar micro-motion stage
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