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3. Ultraprecision positioning using leas; screw drive (2nd report);Otsuka;Int J Japan Soc Prec Eng,1993
4. Precision X-Y stage with a piezo-driven fine-table;Moriyama;Bull Japan Soc Prec Eng,1988
5. Ultra precision wafer positioning by six-axis micromotion mechanism;Taniguchi;Int J Japan Soc Prec Eng,1992