Author:
Guo Fanyi,Sun Zhili,Zhang Shengnan,Cao Runan,Li Haiyang
Funder
National Natural Science Foundation of China
Fundamental Research Funds for the Central Universities
Subject
Computer Science Applications,Mechanical Engineering,Mechanics of Materials,Bioengineering
Reference48 articles.
1. Design, pseudostatic model, and PVDF-based motion sensing of a piezo-actuated XYZ flexure manipulator;Ling;IEEE/ASME Trans. Mechatron.,2018
2. A Multi-Objective Optimization Design For a New Linear Compliant Mechanism;Dang,2020
3. A new nano-accuracy AFM system for minimizing Abbe errors and the evaluation of its measuring uncertainty;Kim;Ultramicroscopy,2007
4. Design and input-shaping control of a novel scanner for high-speed atomic force microscopy;Schitter;Mechatronics,2008
5. Force control of linear motor stages for microassembly;Gorman;Am. Soc. Mech. Eng. Dyn. Syst. Control Div. DSC,2003
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