Spatial and temporal evolution of ion energies in high power impulse magnetron sputtering plasma discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3486018
Reference22 articles.
1. A novel pulsed magnetron sputter technique utilizing very high target power densities
2. Study of the transport of titanium neutrals and ions in the post-discharge of a high power pulsed magnetron sputtering device
3. Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
4. Plasma dynamics in a highly ionized pulsed magnetron discharge
5. Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge
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