Low-pressure high-current pulsed magnetron discharge with electron injection from a vacuum arc plasma emitter
Author:
Funder
Russian Science Foundation
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference37 articles.
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1. Low-pressure high-current magnetron discharge with electron injection: From self-sputtering with multiply charged metal ions to non-sputtering with “pure” gas ions;Vacuum;2024-10
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