Gettering of interstitial iron in silicon by plasma-enhanced chemical vapour deposited silicon nitride films-Reference-Cited by-同舟云学术

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Gettering of interstitial iron in silicon by plasma-enhanced chemical vapour deposited silicon nitride films

Published:2016-11-21 Issue:19 Volume:120 Page:193103
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Liu A. Y.¹^ORCID,Sun C.¹^ORCID,Markevich V. P.²^ORCID,Peaker A. R.²,Murphy J. D.³,Macdonald D.¹

Affiliation:

1. Research School of Engineering, Australian National University, Canberra, Australian Capital Territory 2601, Australia

2. Photon Science Institute, University of Manchester, Manchester M13 9PL, United Kingdom

3. School of Engineering, University of Warwick, Coventry CV4 7AL, United Kingdom

Funder

Australian Centre for Advanced Photovoltaics

Engineering and Physical Sciences Research Council (EPSRC)

Australian Renewable Energy Agency (ARENA)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4967914

Reference45 articles.

1. Iron contamination in silicon technology

2. Gettering in silicon

3. Gettering in silicon photovoltaics: current state and future perspectives

4. Direct comparison of boron, phosphorus, and aluminum gettering of iron in crystalline silicon

5. Improved phosphorous gettering of multicrystalline silicon

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1. Advancements in Passivation and Metallization Techniques for n-Type Monocrystalline Silicon Solar Cells;Solar Energy and Sustainable Development Journal;2024-08-23

2. Reassessing iron–gallium recombination activity in silicon;Journal of Applied Physics;2024-04-03

3. Gettering of iron by aluminum oxide thin films on silicon wafers: Kinetics and mechanisms;Journal of Applied Physics;2024-02-09

4. Industrial Czochralski n‐type Silicon Wafers: Gettering Effectiveness and Possible Bulk Limiting Defects;Solar RRL;2023-12-28

5. Dislocations in Crystalline Silicon Solar Cells;Advanced Energy and Sustainability Research;2023-12-27

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