Influence of elastic strains on the mask ratio in glassy polymer nanoimprint
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1868074
Reference12 articles.
1. Patterning of polymer-supported metal films by microcutting
2. Room-Temperature Imprint Lithography
3. Nanoimprint lithography
4. A contribution to the flow behaviour of thin polymer films during hot embossing lithography
5. Step and flash imprint lithography: a new approach to high-resolution patterning
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