On the generation of magnetic field enhanced microwave plasma line
Author:
Affiliation:
1. Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China
2. Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023, China
Funder
National Natural Science Foundation of Anhui Province
National Natural Science Foundation of China (NSFC)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4971446
Reference38 articles.
1. Plasma and ion sources in large area coating: A review
2. Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
3. Linear Plasma Sources for Large Area Film Deposition: A Brief Review
4. Problems of Power Feeding in Large Area PECVD of Amorphous Silicon
5. Investigating a coaxial linear microwave discharge
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electron cyclotron resonance (ECR) enhanced diverging magnetic field for controlled particle flux in a microwave-excited plasma column – a numerical investigation;Physica Scripta;2024-01-31
2. Effect of magnetic field due to permanent magnets on microwave discharge plasma;Indian Journal of Physics;2023-12-24
3. Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy;Plasma Science and Technology;2022-01-17
4. Electromagnetic Energy Rotation Caused by Surface Flute Waves;Surface Flute Waves in Plasmas;2022
5. An investigation on improving the homogeneity of plasma generated by linear microwave plasma source with a length of 1550 mm;Plasma Science and Technology;2021-01-15
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3