Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system-Reference-Cited by-同舟云学术

Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system

Published:2015-06-30 Issue:11 Volume:212 Page:2418-2423
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Taylor Andrew¹²,Ashcheulov Petr¹³,Čada Martin¹,Fekete Ladislav¹,Hubík Pavel¹,Klimša Ladislav¹,Olejníček Jiří¹,Remeš Zdeněk¹²,Jirka Ivan⁴,Janíček Petr⁵,Bedel-Pereira Eléna⁶,Kopeček Jaromir¹,Mistrík Jan⁵,Mortet Vincent¹²

Affiliation:

1. Institute of Physics; ASCR v.v.i; Prague Czech Republic

2. Faculty of Biomedical Engineering; Czech Technical University; Prague Czech Republic

3. Faculty of Nuclear Physics and Physical Engineering; Czech Technical University; Prague Czech Republic

4. J. Heyrovský Institute of Physical Chemistry; ASCR v.v.i.; Prague Czech Republic

5. Institute of Applied Physics and Mathematics; University of Pardubice; Pardubice Czech Republic

6. LAAS-CNRS; 31031 Toulouse France

Funder

Academy of Sciences of the Czech Republic, Czech Science Foundation

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201532183/fullpdf

Reference14 articles.

1. Nanocrystalline diamond

2. The CVD of Nanodiamond Materials

3. Diamond thin films: a 21st-century material

4. Superconductive B-doped nanocrystalline diamond thin films: Electrical transport and Raman spectra

5. Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery

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