Maskless implants of 20 keV Ga+ in thin crystalline silicon on insulator
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4789625
Reference24 articles.
1. Multi-Ion Beam Lithography and Processing Studies
2. Drawing graphene nanoribbons on SiC by ion implantation
3. Neon Ion Beam Lithography (NIBL)
4. Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon
5. Frontiers of silicon-on-insulator
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1. Measuring Techniques for the Semiconductor’s Parameters;Springer Handbook of Semiconductor Devices;2022-11-11
2. Directed Self-Assembly of Ge Quantum Dots Using Focused Si2+ Ion Beam Patterning;Scientific Reports;2018-06-19
3. Crystallization properties of Sb-rich GeSbTe alloys by in-situ morphological and electrical analysis;Materials Science in Semiconductor Processing;2017-07
4. Maskless nano-implant of 20keV Ga+ in bulk Si(100) substrates;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-12
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