Author:
Revesz A. G.,Zaininger K. H.,Evans R. J.
Subject
Physics and Astronomy (miscellaneous)
Cited by
17 articles.
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1. A model for thermal oxidation of Si and SiC including material expansion;Journal of Applied Physics;2015-02-28
2. SiO2 Films;Handbook of Ellipsometry;2005
3. The Isolation Oxidation of Silicon;SIAM Journal on Applied Mathematics;1989-02
4. Thermionic emission model for the initial regime of silicon oxidation;Applied Physics Letters;1987-09-07
5. Models for the oxidation of silicon;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1986-05