The Isolation Oxidation of Silicon
Author:
Publisher
Society for Industrial & Applied Mathematics (SIAM)
Subject
Applied Mathematics
Link
http://epubs.siam.org/doi/pdf/10.1137/0149016
Reference13 articles.
1. Two-dimensional oxidation
2. General Relationship for the Thermal Oxidation of Silicon
3. A new analytical model of the "Bird's beak"
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