Electron energy distribution functions in low-pressure inductively coupled bounded plasmas
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2339024
Reference39 articles.
1. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
2. Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode
3. Measured and simulated electron energy distribution functions in a low‐pressure radio frequency discharge in argon
4. Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge
5. Tonks-Langmuir problem for a bi-Maxwellian plasma
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