Water reaction with chlorine-terminated silicon (111) and (100) surfaces
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2119426
Reference24 articles.
1. High-κ gate dielectrics: Current status and materials properties considerations
2. Reaction–diffusion in high-k dielectrics on Si
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