Correlation between optical emission spectroscopy of hydrogen/germane plasma and the Raman crystallinity factor of germanium layers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4802028
Reference22 articles.
1. Microcrystalline silicon deposition: Process stability and process control
2. Time-dependent gas phase kinetics in a hydrogen diluted silane plasma
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4. Hidden parameters in the plasma deposition of microcrystalline silicon solar cells
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