Low specific resistance (<6×10−6Ω cm2) TiC ohmic contacts ton‐type β‐SiC
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112797
Reference10 articles.
1. Low energy ion‐assisted deposition of titanium nitride ohmic contacts on alpha (6H)‐silicon carbide
2. Ohmic Contacts on β-SiC
3. Thermally Activated Reactions of Titanium Thin Films with (100) 3C-SiC Substrates
4. Low resistivity (∼10−5Ω cm2) ohmic contacts to 6H silicon carbide fabricated using cubic silicon carbide contact layer
5. High Temperature Ohmic Contact Metallizations for n‐Type 3 C ‐ SiC
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