Low energy ion‐assisted deposition of titanium nitride ohmic contacts on alpha (6H)‐silicon carbide
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105836
Reference18 articles.
1. Titanium nitride Schottky‐barrier contacts to GaAs
2. Tungsten/titanium nitride low‐resistance interconnections durable for high‐temperature processing
3. Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection. I. Ti on Si
4. Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation
5. Properties of TiSi2 as an encroachment barrier for the growth of selective tungsten on silicon
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3. Synthesis and Field Emission Characterization of Titanium Nitride Nanowires;Journal of Nanoscience and Nanotechnology;2007-08-01
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