Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection. I. Ti on Si
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.340410
Reference10 articles.
1. Development of the self-aligned titanium silicide process for VLSI applications
2. Titanium silicidation by halogen lamp annealing
3. Formation of Titanium Nitride/Silicide Bilayers by Rapid Thermal Anneal in Nitrogen
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