Laser induced transformation of TiSi2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1606111
Reference20 articles.
1. Metastable phase formation in titanium‐silicon thin films
2. Morphology and phase stability of TiSi2on Si
3. Effect of composition on phase formation and morphology in Ti–Si1−xGex solid phase reactions
4. Surface nucleation of Ti silicides at elevated temperatures
5. Kinetic mechanisms of theC49-to-C54 polymorphic transformation in titanium disilicide thin films: A microstructure-scaled nucleation-mode transition
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1. C54-TiSi2 formation using nanosecond laser annealing of A-Si/Ti/A-Si stacks;Thin Solid Films;2024-06
2. Impact of nanosecond laser energy density on the C40-TiSi2 formation and C54-TiSi2 transformation temperature;Journal of Applied Physics;2020-08
3. Characterization of an AX Compound Derived from Ti 2 SC MAX Phase;European Journal of Inorganic Chemistry;2019-04-23
4. Titanium Interlayer Mediated Epitaxy of CoSi2 on Si1−xGex;Thin Solid Films;2008-02
5. Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1−xGex∕Si heterostructure;Applied Physics Letters;2007-02-12
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