Anatomy-performance correlation in Ti-based contact metallizations on AlGaN∕GaN heterostructures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2433765
Reference29 articles.
1. Correlation of contact resistance with microstructure for Au/Ni/Al/Ti/AlGaN/GaN ohmic contacts using transmission electron microscopy
2. A review of the metal–GaN contact technology
3. Microstructure of Ti/Al and Ti/Al/Ni/Au Ohmic contacts for n‐GaN
4. Comparison of Ir and Ni-based Ohmic contacts for AlGaN/GaN high electron mobility transistors
5. Study of contact formation in AlGaN/GaN heterostructures
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2. A Study on the Optimized Ohmic Contact Process of AlGaN/GaN-Si MIS-HEMTs;IEEE Access;2021
3. Circular Transmission Line Measurement (CTLM) Studies on Epitaxial Layers of AlGaN;Materials Today: Proceedings;2018
4. Alloyed Si/Al-based ohmic contacts to AlGaN/GaN nitride heterostructures;Semiconductors;2017-04
5. Non-thermal alloyed ohmic contact process of GaN-based HEMTs by pulsed laser annealing;Semiconductor Science and Technology;2016-03-15
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