Low resistivity (∼10−5Ω cm2) ohmic contacts to 6H silicon carbide fabricated using cubic silicon carbide contact layer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111193
Reference12 articles.
1. Recent developments in SiC single-crystal electronics
2. Thin film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon carbide
3. Blue LEDs, UV photodiodes and high-temperature rectifiers in 6H-SiC
4. The potential of diamond and SiC electronic devices for microwave and millimeter-wave power applications
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