1. Synthesis and Real Structure, Institute for Material Science, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany
2. Power Electronics, Institute for Sustainable Systems Engineering, Freiburg University, Emmy-Noether-str. 2, D-79110 Freiburg, Germany
3. Nanoelectronics, Institute of Electrical Engineering and Information Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany
4. Fraunhofer Institute for Applied Solid State Physics (IAF), Tullastr. 72, D-79108 Freiburg, Germany
5. Fraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstr. 1, D-25524 Itzehoe, Germany
6. Microsystems and Technology Transfer, Institute for Material Science, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany