Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1621711
Reference45 articles.
1. The deposition and study of hard carbon films
2. Electrical characteristics and growth kinetics in discharges used for plasma deposition of amorphous carbon
3. Highly tetrahedral, diamond‐like amorphous hydrogenated carbon prepared from a plasma beam source
4. Deposition of Diamondlike Carbon Films Using Electron Cyclotron Resonance Plasma Chemical Vapor Deposition from Ethylene Gas
5. The Preparation, Characterization and Tribological Properties of TA-C:H Deposited Using an Electron Cyclotron Wave Resonance Plasma Beam Source
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