The deposition and study of hard carbon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343355
Reference12 articles.
1. Structure and properties of quasi-amorphous films prepared by ion beam techniques
2. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
3. Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layers
4. rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications
5. Crystal structure of diamondlike carbon films prepared by ionized deposition from methane gas
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