Crystal structure of diamondlike carbon films prepared by ionized deposition from methane gas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.333385
Reference12 articles.
1. Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma
2. Structural investigation of thin films of diamondlike carbon
3. The growth of carbon films with random atomic structure from ion impact damage in a hydrocarbon plasma
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