Radio frequency sheath formation and excitation around a stepped electrode
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1846939
Reference25 articles.
1. Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in RF high-density plasmas
2. Effect of bumps on the wafer on ion distribution functions in high-density argon and argon-chlorine discharges
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