The erosion groove effects on RF planar magnetron sputtering
Author:
Funder
National Funding of Research
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference38 articles.
1. Reactive magnetron sputtering of thin films: present status and trends
2. Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN
3. Influence of surface morphology on sputtering yields
4. The effect of target aging on the structure formation of zinc oxide during reactive sputtering
5. Observations on the operation of a planar magnetron sputtering system by target erosion patterns
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3. Radio-frequency magnetron sputter deposition of ultrathick boron carbide films;Journal of Vacuum Science & Technology A;2023-02-23
4. High-precision modeling of dynamic etching in high-power magnetron sputtering;Journal of Physics D: Applied Physics;2022-05-31
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