Capacitive radio frequency discharges with a single ring-shaped narrow trench of various depths to enhance the plasma density and lateral uniformity
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Published:2016-03
Issue:3
Volume:23
Page:033510
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ISSN:1070-664X
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Container-title:Physics of Plasmas
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language:en
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Short-container-title:Physics of Plasmas
Author:
Ohtsu Y.ORCID,
Matsumoto N.,
Schulze J.,
Schuengel E.
Subject
Condensed Matter Physics
Cited by
24 articles.
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