Carbon enhancement effect on oxygen precipitation in Czochralski silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336907
Reference18 articles.
1. The effect of carbon on thermal donor formation in heat treated pulled silicon crystals
2. Carbon and oxygen role for thermally induced microdefect formation in silicon crystals
3. Suppression effect upon oxygen precipitation in silicon by carbon for a two‐step thermal anneal
4. The role of carbon in the precipitation of oxygen in silicon
5. Influence of carbon and oxygen on donor formation at 700 °C in Czochralski‐grown silicon
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