Design and construction of a research atomic layer deposition system for in situ infrared and electron spectroscopies-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Design and construction of a research atomic layer deposition system for in situ infrared and electron spectroscopies

Published:2014-11 Issue:11 Volume:85 Page:114101
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Bermudez V. M.

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4900724

Reference39 articles.

1. Atomic Layer Deposition: An Overview

2. Mechanisms of surface reactions in thin solid film chemical deposition processes

3. The Surface Chemistry of Atomic Layer Depositions of Solid Thin Films

4. Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

5. In Situ Infrared Characterization during Atomic Layer Deposition of Lanthanum Oxide

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Density Functional Theory Study of the Adsorption and Dissociation of Copper(I) Acetamidinates on Ni(110): The Effect of the Substrate;The Journal of Physical Chemistry C;2020-07-01

2. Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth;Review of Scientific Instruments;2018-12

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3