Orientation‐dependent doping in organometallic chemical vapor deposition on nonplanar InP substrates: Application to double‐heterostructure lasers and lateralp‐njunction arrays
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103119
Reference10 articles.
1. A study of the orientation dependence of Ga(Al)As growth by MOVPE
2. Patterned quantum well heterostructures grown by OMCVD on non-planar substrates: Applications to extremely narrow SQW lasers
3. Design of guided‐wave components using growth of GaAs/AlGaAs superlattices on patterned substrates by organometallic chemical vapor deposition
4. Code: A novel MOVPE technique for the single stage growth of buried ridge double heterostructure lasers and waveguides
5. Buried GaInAs/InP layers grown on nonplanar substrates by one‐step low‐pressure metalorganic vapor phase epitaxy
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1. InGaAs and InAsP V-groove quantum wires using arsenic/phosphorus exchange preparation;Journal of Crystal Growth;1998-12
2. Dependence of indium incorporation upon the substrate misorientation during growth of In x Ga 1 − x As by metalorganic vapour phase epitaxy;Journal of Crystal Growth;1996-10
3. Analysis of InP etched surfaces using metalorganic chemical vapor deposition regrown quantum well structures;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11
4. The n-type doping of and growth of two-dimensional electron gas structures with DEAlH-NMe3 as Al source;Journal of Crystal Growth;1995-01
5. ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION FOR OPTOELECTRONIC INTEGRATED CIRCUITS;Integrated Optoelectronics;1995
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