Resistivity size effect in epitaxial iridium layers
Author:
Affiliation:
1. Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, 110 8th St., Troy, New York 12180, USA
Funder
Semiconductor Research Corporation
Division of Materials Research
NY State
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0060845
Reference57 articles.
1. Influence of phonon, geometry, impurity, and grain size on Copper line resistivity
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5. Size-Dependent Resistivity in Nanoscale Interconnects
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