Size-Dependent Resistivity in Nanoscale Interconnects
Author:
Affiliation:
1. Metallurgy Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899;
2. IMEC, High Tech Campus 31, 5605 KN Eindhoven, The Netherlands;
3. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium;
Abstract
Publisher
Annual Reviews
Subject
General Materials Science
Link
https://www.annualreviews.org/doi/pdf/10.1146/annurev-matsci-082908-145415
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