Effects of interfacial sulfidization and thermal annealing on the electrical properties of an atomic-layer-deposited Al2O3 gate dielectric on GaAs substrate-Reference-Cited by-同舟云学术

Effects of interfacial sulfidization and thermal annealing on the electrical properties of an atomic-layer-deposited Al2O3 gate dielectric on GaAs substrate

Published:2008-04 Issue:7 Volume:103 Page:074102
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Cheng Chao-Ching,Chien Chao-Hsin,Luo Guang-Li,Yang Chun-Hui,Chang Ching-Chih,Chang Chun-Yen,Kei Chi-Chung,Hsiao Chien-Nan,Perng Tsong-Pyng

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2901167

Reference39 articles.

1. Characteristics of sputtered Hf1−xSixO2∕Si∕GaAs gate stacks

2. GaAs metal insulator semiconductor capacitors and high transconductance metal insulator semiconductor field effect transistors

3. Characterization of atomic-layer-deposited Al2O3∕GaAs interface improved by NH3 plasma pretreatment

4. Structural and electrical characteristics of Ga2O3(Gd2O3)∕GaAs under high temperature annealing

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparison of the reactivity of alkyl and alkyl amine precursors with native oxide GaAs(100) and InAs(100) surfaces;Applied Surface Science;2016-12

2. Leakage current characteristics in MOCVD grown InAs quantum dot embedded GaAs metal-oxide-semiconductor capacitor;RSC Advances;2015

3. Impact of Gd2O3 passivation layer on interfacial and electrical properties of atomic-layer-deposited ZrO2 gate dielectric on GaAs;Applied Surface Science;2014-02

4. High-k ZrO2 dielectric thin films on GaAs semiconductor with reduced regrowth of native oxides by atomic layer deposition;Chemical Physics Letters;2013-09

5. Electrical characteristics of ZrO2/GaAs MOS capacitor fabricated by atomic layer deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2013-07