Influence of grain size on the transformation temperature of C49 TiSi2to C54 TiSi2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337815
Reference4 articles.
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3. Impact of Ge Preamorphization Implantation on Both the Formation of Ultrathin TiSix and the Specific Contact Resistivity in TiSix/n-Si Contacts;IEEE Transactions on Electron Devices;2018-10
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