Nucleation and growth of titanium silicide studied byinsituannealing in a transmission electron microscope
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337928
Reference19 articles.
1. Initial reactions and silicide formation of titanium on silicon studied by Raman spectroscopy
2. Chemical and structural aspects of reaction at the Ti/Si interface
3. First Phase Nucleation And Growth Of Titanium Disilicide With An iPhasis On The Influence Of Oxygen
4. Kinetics of formation of silicides: A review
5. Metastable phase formation in titanium‐silicon thin films
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