Light extraction enhancement of AlGaN-based ultraviolet light-emitting diodes by substrate sidewall roughening

Author:

Guo Yanan12,Zhang Yun1234,Yan Jianchang1234ORCID,Xie Haizhong1234,Liu Lei12,Chen Xiang12ORCID,Hou Mengjun5,Qin Zhixin5,Wang Junxi1234,Li Jinmin1234

Affiliation:

1. Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

2. University of Chinese Academy of Sciences, Beijing 100049, China

3. Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China

4. State Key Laboratory of Solid State Lighting, Beijing 100083, China

5. State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China

Funder

National 1000 Young Talents Program

National Key R&D Program of China

National Natural Science Foundation of China (NSFC)

Youth Innovation Promotion Association of the Chinese Academy of Sciences (Youth Innovation Promotion Association CAS)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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