Affiliation:
1. National Chung Hsing University
2. Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province (IKKEM)
Abstract
In this study, AlGaN-based deep-ultraviolet light-emitting diodes (DUV-LEDs) processed via standard laser dicing (SLD) and multifocal laser stealth dicing (MFLSD) were investigated. Adopting the MFLSD technology would generate a roughing surface rather than the V-shaped grooves on the sidewall of 508 × 508 µm2 DUV-LEDs, which would reduce the forward operating voltage and increase the wall-plug efficiency, light output power, and far-field radiation patterns of these devices. In addition, the wavelength shift, far-field patterns, and light-tracing simulation results of the DUV-LEDs processed with SLD and MFLSD were clearly demonstrated and analyzed. Accordingly, it was observed that the MFLSD process provided more possibilities for photon escape to increase the light extraction efficiency (LEE) of DUV-LEDs, thus decreased the wavelength-redshift and junction temperature in DUV-LEDs. These results provide a reference for advanced nano-processing practices implemented during the fabrication of semiconductor devices.
Funder
National Natural Science Foundation of China
Compound Semiconductor Technology Collaborative Innovation Platform Project of FuXiaQuan National Independent Innovation Demonstration Zone
Fundamental Research Funds for the Central Universities
Science and Technology Projects of Fujian Province
Science and Technology Plan Project in Fujian Province of China
Natural Science Foundation of Fujian Province