Understanding the discharge voltage behavior during reactive sputtering of oxides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2404583
Reference30 articles.
1. Fundamental understanding and modeling of reactive sputtering processes
2. Reactive DC magnetron sputtering of elemental targets in Ar/N2 mixtures: relation between the discharge characteristics and the heat of formation of the corresponding nitrides
3. Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons
4. Self-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture
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