Fundamental understanding and modeling of reactive sputtering processes
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Recent aspects concerning DC reactive magnetron sputtering of thin films: a review
2. Handbook of Thin Film Process Technology;Berg,1998
3. Modeling of reactive sputtering of compound materials
4. Predicting thin‐film stoichiometry in reactive sputtering
5. Modeling the stability of reactive sputtering processes
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