Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates
Author:
Affiliation:
1. Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA
2. School of Materials Science and Engineering, The University of New South Wales, Sydney, NSW 2052, Australia
Funder
National Science Foundation
Army Research Office
Australian Research Council
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5031134
Reference50 articles.
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2. Integration of lead-free ferroelectric on HfO2/Si (100) for high performance non-volatile memory applications
3. Toward a multifunctional monolithic device based on pyroelectricity and the electrocaloric effect of thin antiferroelectric Hf x Zr 1−x O 2 films
4. Thin HfxZr1-xO2Films: A New Lead-Free System for Electrostatic Supercapacitors with Large Energy Storage Density and Robust Thermal Stability
5. Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes
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