Author:
Jones K. S.,Moller K.,Chen J.,Puga-Lambers M.,Freer B.,Berstein J.,Rubin L.
Subject
General Physics and Astronomy
Cited by
47 articles.
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1. Improved physical models for advanced silicon device processing;Materials Science in Semiconductor Processing;2017-05
2. Formation of Ultra-Shallow Junctions;Reference Module in Materials Science and Materials Engineering;2016
3. The effects of swift heavy-ion irradiation on helium-ion-implanted silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-10
4. Modeling of defects, dopant diffusion and clustering in silicon;Journal of Computational Electronics;2013-10-23
5. (Invited) Defect Engineering at the Nanoscale: Challenges and Trends;ECS Transactions;2013-03-15