Doping studies using thermal beams in chemical‐beam epitaxy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337503
Reference14 articles.
1. Chemical beam epitaxy of InP and GaAs
2. Chemical beam epitaxy of InGaAs
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4. Metalorganic Chemical Vapor Deposition
5. A new GaAs, GaP, and GaAsxP1−x vacuum deposition technique using arsine and phosphine gas
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