A new GaAs, GaP, and GaAsxP1−x vacuum deposition technique using arsine and phosphine gas
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Published:1974-03
Issue:2
Volume:11
Page:506-510
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Morris F. J.,Fukui H.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
42 articles.
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