Author:
Yamaoka Tomonori,Oyoshi Keiji,Tagami Takashi,Arima Yasunori,Yamashita Ken,Tanaka Shuhei
Subject
Physics and Astronomy (miscellaneous)
Cited by
13 articles.
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1. Heat treatment of ion-irradiated silica-based thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-05
2. Influence of Polysilicon Deposition Conditions on Advanced 3D NAND;ECS Journal of Solid State Science and Technology;2019
3. Fundamentals for the formation and structure control of thin films;Handbook of Thin Films;2002
4. Effects of carbon implantation on the electrical properties of amorphous In2O3 thin film;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-11
5. Crystallization effects and diamond formation in amorphous carbon films under low energy ion beam irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-05