Thermal decomposition of ultrathin oxide layers on Si(111) surfaces mediated by surface Si transport
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.118495
Reference11 articles.
1. Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE
2. Nanostructure fabrication using the selective thermal desorption of SiO2 induced by electron beams
3. Observation of interfacial atomic steps during silicon oxidation
4. Kinetics of high‐temperature thermal decomposition of SiO2 on Si(100)
5. Thermal decomposition of very thin oxide layers on Si(111)
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